LEYBOLD
Leybold TURBOVAC 90 i/iX Turbomolecular Vacuum Pump
- Pumping speed — nitrogen
- 90 l/s (DN63); 38 l/s (90 i DN40)
- High-vacuum inlet connection
- DN63 ISO-K or CF; DN40 ISO-KF on 90 i
- Cooling
- Convection; optional air or water cooling
LEYBOLD brand guide / Product family
Leybold TURBOVAC i / iX turbomolecular pumps
TURBOVAC i and iX listings offer different high-vacuum pumping capacities and connection choices.
Selecting a turbo pump for your chamber
TURBOVAC i and iX selection starts with the gas load and the pumping speed available at the chamber. Compare nitrogen, helium and hydrogen figures separately. Inlet conductance, backing pressure and cooling affect the installation. The model pages explain interface choices, TURBO.CONTROL i, power supplies and accessory connections; an available connection does not mean its accessory is included.
What to check when selecting this range
Compare gas-specific pumping speed, inlet size, cooling and control arrangements. Confirm the backing pump and the exact i or iX configuration.
Select the backing stage
Compare SCROLLVAC dry scroll backing pumps. Match backing pressure, throughput and gas compatibility to the selected turbo and process; flange size alone does not establish compatibility.
Compare the listed models
Compare values with their stated gas, frequency and configuration conditions. A blank specification means it needs confirmation. Listed equipment is subject to a quotation; inclusion here does not indicate stock.
| Model | Pumping speed — nitrogen | End / ultimate pressure | High-vacuum inlet connection |
|---|---|---|---|
| Leybold TURBOVAC 90 i/iX Turbomolecular Vacuum Pump | 90 l/s (DN63); 38 l/s (90 i DN40) | <8 × 10^-8 / <5 × 10^-10 mbar, with two-stage oil-sealed rotary vane backing pump — ISO-K / CF | DN63 ISO-K or CF; DN40 ISO-KF on 90 i |
| Leybold TURBOVAC 250 i/iX Turbomolecular Vacuum Pump | 225 l/s | <8 × 10^-8 / <5 × 10^-10 mbar, with two-stage oil-sealed rotary vane backing pump — ISO-K / CF | DN100 ISO-K or CF |
| Leybold TURBOVAC 350 i/iX Turbomolecular Vacuum Pump | 290 l/s (60,000 rpm); 270 l/s (48,000 rpm V1001) | <8 × 10^-8 / <5 × 10^-10 mbar, with two-stage oil-sealed rotary vane backing pump; standard version — ISO-K / CF | DN100 ISO-K or CF |
| Leybold TURBOVAC 450 i/iX Turbomolecular Vacuum Pump | 430 l/s (60,000 rpm); 370 l/s (48,000 rpm V1001) | <8 × 10^-8 / <5 × 10^-10 mbar, with two-stage oil-sealed rotary vane backing pump; standard version — ISO-K / CF | DN160 ISO-K or CF |
| Leybold TURBOVAC 850 i/iX Turbomolecular Vacuum Pump | 720 l/s | 3 × 10^-8 / 3 × 10^-10 mbar, with two-stage oil-sealed rotary vane backing pump — ISO-K / CF | DN160 ISO-K or CF |
| Leybold TURBOVAC 950 i/iX Turbomolecular Vacuum Pump | 900 l/s | 3 × 10^-8 / 3 × 10^-10 mbar, with two-stage oil-sealed rotary vane backing pump — ISO-K / CF | DN200 ISO-K or CF |
Models and configurations
LEYBOLD
Leybold TURBOVAC 250 i/iX Turbomolecular Vacuum Pump
- Pumping speed — nitrogen
- 225 l/s
- High-vacuum inlet connection
- DN100 ISO-K or CF
- Cooling
- Convection standard; forced-air or water cooling may be required
LEYBOLD
Leybold TURBOVAC 350 i/iX Turbomolecular Vacuum Pump
- Pumping speed — nitrogen
- 290 l/s (60,000 rpm); 270 l/s (48,000 rpm V1001)
- High-vacuum inlet connection
- DN100 ISO-K or CF
- Cooling
- Convection; optional air or water cooling
LEYBOLD
Leybold TURBOVAC 450 i/iX Turbomolecular Vacuum Pump
- Pumping speed — nitrogen
- 430 l/s (60,000 rpm); 370 l/s (48,000 rpm V1001)
- High-vacuum inlet connection
- DN160 ISO-K or CF
- Cooling
- Convection; optional air or water cooling
LEYBOLD
Leybold TURBOVAC 850 i/iX Turbomolecular Vacuum Pump
- Pumping speed — nitrogen
- 720 l/s
- High-vacuum inlet connection
- DN160 ISO-K or CF
- Cooling
- Convection; optional air or water cooling
LEYBOLD
Leybold TURBOVAC 950 i/iX Turbomolecular Vacuum Pump
- Pumping speed — nitrogen
- 900 l/s
- High-vacuum inlet connection
- DN200 ISO-K or CF
- Cooling
- Convection; optional air or water cooling
Documentation and specification checks
Open the model page for its specifications and available manufacturer downloads. Match the full model, suffix and revision to the equipment being supplied. Keep installation limits and performance test conditions with the figure when comparing alternatives.
- TURBO.CONTROL i brochure, 3610 0092 02 (July 2024) (PDF)
- TURBOVAC i/iX range brochure: accessory compatibility tables, pages 16–17 (PDF)
- TVi interface-module installation, 300905828_002_C0 (PDF)
- EtherNet/IP interface instructions, 300642487_002_C1 (PDF)
- EtherCAT interface instructions, 300687441_002_C1 (PDF)
- Relay Box instructions, 300429073_002_C0 (PDF)
- CF flange-heater instructions, 300487320_002_C1 (PDF)
- TURBOVAC 90–450 operating instructions, 300554863_002_C6 (March 2026) (PDF)
- 90–450 axial and radial air-cooling instructions, 300429072_002_C1 (PDF)
- TURBOVAC 90–450 i/iX operating instructions, May 2024
- TURBOVAC i/iX range brochure, 3610-0041-02
- Download the 48,000 rpm supplement
- TURBO.POWER integra brief instructions, 300450827_002_C2 (PDF)
Compare equipment across manufacturers
Related LEYBOLD families
- Leybold TURBOLAB pumping stations
- Leybold ECODRY plus dry multistage roots pumps
- Leybold SCROLLVAC plus dry scroll pumps
- Leybold TRIVAC L two-stage rotary vane pumps
- Leybold rotary vane pumps
- Leybold THERMOVAC Pirani gauges
- Leybold PENNINGVAC high-vacuum gauges
- Leybold CERAVAC capacitance gauges
- Leybold IONIVAC hot-cathode gauges
- Leybold GRAPHIX and COMBIVAC controllers
- Leybold NOVADRY dry screw vacuum pumps
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- Leybold NEO D two-stage rotary vane pumps
- Leybold SOGEVAC B single-stage rotary vane pumps
Return to the LEYBOLD brand guide · Explore all product families
Specify your LEYBOLD equipment
Send the process, working pressure, gas, required capacity and electrical supply. For measurement, include the range, connection, output and controller. We can confirm the model, accessories and documentation for your quotation.
Compare selected equipment
Compare the stated conditions as well as the values. A missing specification is not a zero rating; confirm suitability with Girovac.