TURBOVAC 950i/ix TURBO PUMP
|Pumping speed (Ar):||840 l/s|
|Pumping speed (He):||925 l/s|
|Pumping speed (H₂):||770 l/s|
|Pumping speed (N₂):||900 l/s|
The TURBOVAC 950i/ix Turbomolecular vacuum pump can be used in applications which require a clean high or ultrahigh vacuum like, for example, in research, development or in industrial fields like the semiconductor industry, analytical instrumentation or coating technology.
In principle, the TURBOVAC 950i/ix turbomolecular pump is a turbine rapidly revolving in a housing where the rotor stages of the turbine Sectional drawing of a turbomolecular pump (TURBOVAC i) are equipped with a number of rotor blades. Located between the rotating rotor blades are stationary stator disks with blades arranged in the opposite direction. By means of a momentum transfer from the rotating rotor blades to the gas molecules their initially nondirectional thermal motion is changed in to a directional motion from the inlet flange of the pump in the axial direction towards the forevacuum flange. In the molecular flow range (i.e. at pressures below 10-3 mbar (0.75 x 10-3 Torr)) the mean free path of the gas molecules is larger then the spacing between the rotor and the stator blades (typically a few tenths of a millimetre). Correspondingly the molecules chiefly collide with the optically dense rotor blades, resulting in a highly efficient pumping action. In the laminar flow range (i.e. at pressures over 10-1 mbar (0.75 x 10-1 Torr)) the effect of the rotor is impaired by frequent collisions between molecules themselves. For this reason, a turbomolecular pump is not capable of pumping gases at atmospheric pressure.
We recomend the use of a GVPDK5 as the backing pump to be used with the TURBOVAC 950i/ix.
The Dimensions and speed curves below.