Leybold TURBOVAC 850 i/iX Turbomolecular Vacuum Pump

Product details

Leybold TURBOVAC 850 i/iX: selection and performance

The Leybold TURBOVAC 850 i/iX offers 720 l/s nitrogen pumping speed through a DN160 ISO-K or CF inlet. It provides a higher-capacity alternative to the TURBOVAC 450 within the same nominal inlet size, with separate performance figures for nitrogen, argon, helium and hydrogen.

Where this pump fits

The TURBOVAC i/iX family is used in analytical instruments, surface analysis, research vacuum systems and coating equipment. Choose the pump for your gas load, target pressure and chamber connection. This model uses a DN160 high-vacuum inlet and a DN25 KF backing port. For process gases, include the gas composition and expected throughput in your enquiry.

Gas-specific performance

Pumping speed describes the volume moved at the pump inlet; throughput also accounts for pressure. Compression describes the pressure ratio between the exhaust and inlet for a particular gas. These figures describe different aspects of performance and should be considered together. For argon and other heavy gases, the cooling and permitted gas load need particular attention.

Installation and electrical specifications

¹ Ultimate pressure is stated with a two-stage oil-sealed rotary vane backing pump. The pressure in your chamber also depends on leaks, outgassing, connecting pipework and process load. Maximum forevacuum pressure is an operating limit; the backing pump must keep below it at your intended throughput.

i or iX: choosing the controls

Both versions have integrated drive electronics. The iX adds vacuum-system control, including a gauge-head connection and configurable accessory outputs. USB and digital I/O are available, while serial and fieldbus connections depend on the ordered interface and pump generation. Confirm the full pump part number and fitted front end when replacing or integrating equipment.

EtherNet/IP and EtherCAT: these are optional pump communication interfaces. Select the matching Anybus-capable configuration and module; an i/iX name alone does not identify the fitted protocol. Module installation, control priority and PLC configuration must follow the relevant pump and interface instructions.

TURBO.CONTROL i: the optional controller operates one TURBOVAC i/iX at a time via RS485 or USB and supports up to two compatible vacuum gauges. It provides a local display, operating-data logging and Ethernet access to its web server. That Ethernet web connection serves a different function from an EtherNet/IP or EtherCAT module on the pump. The tabletop housing, controller supply, gauges and communication cables must be specified as required.

A compatible pump power supply, mains/DC cables and backing pump are needed to run the system. These are separate from the controller’s own supply. Girovac can identify the required combination and which existing items can be retained.

Accessories for TURBOVAC 850 i/iX

The following manufacturer-listed options help specify a complete installation. They are quoted separately unless explicitly included in the selected package. Match the full pump part number, flange, supply and operating conditions before ordering.

The 850/950 uses the larger TURBO.POWER 800 arrangement. Confirm the matching DC cable and mounting kit when ordering the supply.

Relay Box: a configured 24 V DC pump output can switch a suitable mains-powered backing pump through this accessory. Its brief instructions state limits of 250 V AC, 10 A and 1.2 kW; all applicable limits and the starting load must be respected. It is not a universal motor starter. The listed kit includes a 2 m M8 control cable; mains leads are separate.

Venting and purge: a standard vent valve, power-failure vent valve and purge-gas arrangement perform different functions. Specify the intended shutdown behaviour, gas and process conditions. Cooling, venting and purge connections should be checked together with the available accessory outputs.

Flange bakeout: the heater instructions apply to stainless-steel CF flanges, require the pump’s water cooling to operate, and limit the heater temperature to 100 °C. Follow the pump’s own thermal limits and installation instructions; the heater temperature is not a blanket bakeout rating for the entire vacuum assembly.

Control and accessory downloads

• TURBO.CONTROL i brochure, 3610 0092 02 (July 2024) (PDF)
• TURBOVAC i/iX range brochure: accessory compatibility tables, pages 16–17 (PDF)
• TVi interface-module installation, 300905828_002_C0 (PDF)
• EtherNet/IP interface instructions, 300642487_002_C1 (PDF)
• EtherCAT interface instructions, 300687441_002_C1 (PDF)
• Relay Box instructions, 300429073_002_C0 (PDF)
• CF flange-heater instructions, 300487320_002_C1 (PDF)

For an integration quotation, include the full pump part number, PLC protocol, required gauge inputs, cooling method, venting sequence, backing-pump electrical rating and UK or other mains supply. A nameplate photograph helps confirm the appropriate interfaces and accessories.

Backing pumps, cooling and vacuum measurement

Match the backing pump to both the gas throughput and the turbo pump’s forevacuum limit. Two-stage rotary vane pumps are one option; Dry backing pumps, including ECODRY and SCROLLVAC, may be appropriate where the process calls for them. We can help you compare the complete combination.

Convection cooling is suitable only within the permitted thermal operating conditions. Forced-air or water cooling may be required as gas throughput or ambient temperature rises. Keep access to the cooling connections in mind when planning the mounting.

Select vacuum gauges for the chamber and backing line separately: each needs the right measurement range, gas compatibility and control output.

Pumping speed versus inlet pressure

Find your process gas in the legend, locate the inlet pressure on the horizontal axis, then read the pumping speed on the vertical axis. Pressure is plotted on a logarithmic scale. The speed available at your chamber will also depend on the connecting pipework.

The 850 curve is on the left of the comparison below.

The curve must be used alongside the permitted backing pressure, gas throughput and cooling conditions. It shows pumping performance rather than electrical consumption; the power figures are listed separately above.

Manuals, curves and dimensional drawings

• TURBOVAC i/iX range brochure, 3610-0041-02: compare pump sizes, dimensions, interfaces and accessories.

How the pump creates a clean vacuum

TURBOVAC i/iX pumps combine a turbomolecular rotor with hybrid bearing technology: a permanent magnetic bearing at the high-vacuum end and a lubricated mechanical bearing at the forevacuum end. The design does not use an oil reservoir in the pumping chamber. Cleanliness still depends on the complete installation, including the backing pump, seals and process gases.

Questions about the TURBOVAC 850 i/iX

Which other model should I compare?

Compare the TURBOVAC 450 i/iX if you need a DN160 inlet and 430 l/s nitrogen pumping speed. Check the gas-specific figures and installation requirements for both pumps before choosing.

Can this pump operate without a backing pump?

No. It needs a suitable backing pump and the manufacturer’s start-up and shutdown sequence. If you already have a backing pump, send us its model and your process details so we can check whether it is suitable.

Which vacuum gauges will I need?

The chamber and backing line operate at different pressures. Choose vacuum gauges that cover each measurement range and work with your gases and controls. Tell us your target pressure and whether you need a local display or a signal for the control system.

What is included with the pump?

Your quotation will set out the pump version, power supply, controls, cables and cooling accessories included. Let us know which items you already have so we can quote what you need.

Ask Girovac about this pump

Tell us the gas you are pumping, your target pressure, expected gas load and chamber connection. Request a quotation or call 01692 660117 for help with selection, price and availability.

Compare all turbomolecular pumps.

Complete high-vacuum pumping station

For a mobile dry pumping system with ECODRY 35 plus backing and TURBO.CONTROL i, see the Leybold TURBOLAB 850 pumping station. Compare inlet flanges, controls and regional electrical options.