TURBOVAC 90i/ix TURBO PUMP

The TURBOVAC 90i/ix can be supplied with either a DN63CF or DN iso-63K top flange.

The TURBOVAC 90i/ix Turbomolecular vacuum pump can be used in applications which require a clean high or ultrahigh vacuum like, for example, in research, development or in industrial fields like the semiconductor industry, analytical instrumentation or coating technology.

In principle, the TURBOVAC 90i/ix turbomolecular pump is a turbine rapidly revolving in a housing where the rotor stages of the turbine Sectional drawing of a turbomolecular pump (TURBOVAC i) are equipped with a number of rotor blades. Located between the rotating rotor blades are stationary stator disks with blades arranged in the opposite direction. By means of a momentum transfer from the rotating rotor blades to the gas molecules their initially nondirectional thermal motion is changed in to a directional motion from the inlet flange of the pump in the axial direction towards the forevacuum flange. In the molecular flow range (i.e. at pressures below 10^-3 mbar (0.75 x 10^-3 Torr)) the mean free path of the gas molecules is larger then the spacing between the rotor and the stator blades (typically a few tenths of a millimetre). Correspondingly the molecules chiefly collide with the optically dense rotor blades, resulting in a highly efficient pumping action. In the laminar flow range (i.e. at pressures over 10^-1 mbar (0.75 x 10^-1 Torr)) the effect of the rotor is impaired by frequent collisions between molecules themselves. For this reason, a turbomolecular pump is not capable of pumping gases at atmospheric pressure.

We recomend the use of a GVPDK3 or GVPDK5 as the backing pump to be used with the TURBOVAC 250i/ix.

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