The Leybold TURBOVAC 950 i/iX provides 900 l/s nitrogen pumping speed with a DN200 ISO-K or CF inlet. It is the largest inlet option in our listed TURBOVAC range. Girovac can help match the pump, backing arrangement and controls to your high-vacuum system.
Part of the Leybold TURBOVAC i/iX turbomolecular pumps family. Compare the range and other model options.
Tell us the configuration and quantity you need. Include your process requirements if you would like help with selection.
View quote listQuote the complete Leybold ordering code when requesting a price. The entries below identify different configurations; voltage, flange, lubricant, cooling and interfaces must match the installation. Availability and supplied equipment are confirmed with the quotation.
| Product code | Manufacturer designation | Configuration detail |
|---|---|---|
| 840091V1000 | TURBOVAC 950 i – DN 200 ISO-K | TURBOVAC i – frontend 1 (basic) |
| 840091V2000 | TURBOVAC 950 i – DN 200 ISO-K (Anybus) | TURBOVAC i – frontend 2 (Anybus/Fieldbus extention) |
| 840091V3000 | TURBOVAC 950 iX – DN 200 ISO-K (Anybus) | TURBOVAC iX – Xtention box controller |
| 840091V3300 | TURBOVAC 950 iX – DN 200 ISO-K – RS485 | TURBOVAC iX – Xtention box controller |
| 840111V1000 | TURBOVAC 950 i – DN 200 CF | TURBOVAC i – frontend 1 (basic) |
| 840111V2000 | TURBOVAC 950 i – DN 200 CF (Anybus) | TURBOVAC i – frontend 2 (Anybus/Fieldbus extention) |
| 840111V3000 | TURBOVAC 950 iX – DN 200 CF (Anybus) | TURBOVAC iX – Xtention box controller |
| 840111V3300 | TURBOVAC 950 iX – DN 200 CF – RS485 | TURBOVAC iX – Xtention box controller |
The Leybold TURBOVAC 950 i/iX provides 900 l/s nitrogen pumping speed with a DN200 ISO-K or CF inlet. It is the largest inlet option in our listed TURBOVAC range. Girovac can help match the pump, backing arrangement and controls to your high-vacuum system.
The TURBOVAC i/iX family is used in analytical instruments, surface analysis, research vacuum systems and coating equipment. Choose the pump for your gas load, target pressure and chamber connection. This model uses a DN200 high-vacuum inlet and a DN25 KF backing port. For process gases, include the gas composition and expected throughput in your enquiry.
| Gas | Pumping speed (l/s) | Gas throughput (mbar·l/s) | Compression ratio |
|---|---|---|---|
| Nitrogen (N₂) | 900 | 14 | >1 × 10¹¹ |
| Argon (Ar) | 840 | 3.5 | >1 × 10¹¹ |
| Helium (He) | 925 | 21 | 1.3 × 10⁸ |
| Hydrogen (H₂) | 770 | >15 | 4.4 × 10⁶ |
Pumping speed describes the volume moved at the pump inlet; throughput also accounts for pressure. Compression describes the pressure ratio between the exhaust and inlet for a particular gas. These figures describe different aspects of performance and should be considered together. For argon and other heavy gases, the cooling and permitted gas load need particular attention.
| Specification | Value |
|---|---|
| High-vacuum inlet | DN200 ISO-K or CF |
| Backing connection | DN25 KF |
| Ultimate pressure¹ | 3 × 10-8 mbar (ISO-K); 3 × 10-10 mbar (CF) |
| Maximum nitrogen forevacuum pressure | 15 mbar |
| Nominal operating speed | 49,200 rpm |
| Supply voltage | 48 V DC +5% / −10% |
| Maximum power consumption | 600 W |
| Cooling | Convection; forced-air or water cooling as required by gas load and ambient conditions |
¹ Ultimate pressure is stated with a two-stage oil-sealed rotary vane backing pump. The pressure in your chamber also depends on leaks, outgassing, connecting pipework and process load. Maximum forevacuum pressure is an operating limit; the backing pump must keep below it at your intended throughput.
Both versions have integrated drive electronics. The iX adds vacuum-system control, including a gauge-head connection and configurable accessory outputs. USB and digital I/O are available, while serial and fieldbus connections depend on the ordered interface and pump generation. Confirm the full pump part number and fitted front end when replacing or integrating equipment.
EtherNet/IP and EtherCAT: these are optional pump communication interfaces. Select the matching Anybus-capable configuration and module; an i/iX name alone does not identify the fitted protocol. Module installation, control priority and PLC configuration must follow the relevant pump and interface instructions.
TURBO.CONTROL i: the optional controller operates one TURBOVAC i/iX at a time via RS485 or USB and supports up to two compatible vacuum gauges. It provides a local display, operating-data logging and Ethernet access to its web server. That Ethernet web connection serves a different function from an EtherNet/IP or EtherCAT module on the pump. The tabletop housing, controller supply, gauges and communication cables must be specified as required.
A compatible pump power supply, mains/DC cables and backing pump are needed to run the system. These are separate from the controller’s own supply. Girovac can identify the required combination and which existing items can be retained.
The following manufacturer-listed options help specify a complete installation. They are quoted separately unless explicitly included in the selected package. Match the full pump part number, flange, supply and operating conditions before ordering.
| Option | Selection for this model |
|---|---|
| EtherNet/IP / EtherCAT | 410300V0910 / 410300V0911 (IP54 module versions); requires the matching Anybus-capable pump configuration |
| Air cooling | Radial 800136V0011; dedicated 850/950 radial kit |
| Water cooling | 800135V0007; match connections and operating conditions |
| Power supply | TURBO.POWER 800, 800100V0010; select DC cable and mounting kit |
| UK mains cable | 2.5 m 411340V03 for TURBO.POWER 800 |
| Backing-pump switching | Relay Box 800110V0030; check load and pump-output configuration |
| CF flange heating | Request a heater matched to the DN200 CF pump; confirm model compatibility and cooling before ordering |
The 850/950 uses the larger TURBO.POWER 800 arrangement. Confirm the matching DC cable and mounting kit when ordering the supply.
Relay Box: a configured 24 V DC pump output can switch a suitable mains-powered backing pump through this accessory. Its brief instructions state limits of 250 V AC, 10 A and 1.2 kW; all applicable limits and the starting load must be respected. It is not a universal motor starter. The listed kit includes a 2 m M8 control cable; mains leads are separate.
Venting and purge: a standard vent valve, power-failure vent valve and purge-gas arrangement perform different functions. Specify the intended shutdown behaviour, gas and process conditions. Cooling, venting and purge connections should be checked together with the available accessory outputs.
Flange bakeout: the heater instructions apply to stainless-steel CF flanges, require the pump’s water cooling to operate, and limit the heater temperature to 100 °C. Follow the pump’s own thermal limits and installation instructions; the heater temperature is not a blanket bakeout rating for the entire vacuum assembly.
For an integration quotation, include the full pump part number, PLC protocol, required gauge inputs, cooling method, venting sequence, backing-pump electrical rating and UK or other mains supply. A nameplate photograph helps confirm the appropriate interfaces and accessories.
Match the backing pump to both the gas throughput and the turbo pump’s forevacuum limit. Two-stage rotary vane pumps are one option; Dry backing pumps, including ECODRY and SCROLLVAC, may be appropriate where the process calls for them. We can help you compare the complete combination.
Convection cooling is suitable only within the permitted thermal operating conditions. Forced-air or water cooling may be required as gas throughput or ambient temperature rises. Keep access to the cooling connections in mind when planning the mounting.
Select vacuum gauges for the chamber and backing line separately: each needs the right measurement range, gas compatibility and control output.
Find your process gas in the legend, locate the inlet pressure on the horizontal axis, then read the pumping speed on the vertical axis. Pressure is plotted on a logarithmic scale. The speed available at your chamber will also depend on the connecting pipework.
The 950 curve is on the right of the comparison below.
The curve must be used alongside the permitted backing pressure, gas throughput and cooling conditions. It shows pumping performance rather than electrical consumption; the power figures are listed separately above.
TURBOVAC i/iX pumps combine a turbomolecular rotor with hybrid bearing technology: a permanent magnetic bearing at the high-vacuum end and a lubricated mechanical bearing at the forevacuum end. The design does not use an oil reservoir in the pumping chamber. Cleanliness still depends on the complete installation, including the backing pump, seals and process gases.
Compare the TURBOVAC 850 i/iX if you need a DN160 inlet and 720 l/s nitrogen pumping speed. Check the gas-specific figures and installation requirements for both pumps before choosing.
No. It needs a suitable backing pump and the manufacturer’s start-up and shutdown sequence. If you already have a backing pump, send us its model and your process details so we can check whether it is suitable.
The chamber and backing line operate at different pressures. Choose vacuum gauges that cover each measurement range and work with your gases and controls. Tell us your target pressure and whether you need a local display or a signal for the control system.
Your quotation will set out the pump version, power supply, controls, cables and cooling accessories included. Let us know which items you already have so we can quote what you need.
Tell us the gas you are pumping, your target pressure, expected gas load and chamber connection. Request a quotation or call 01692 660117 for help with selection, price and availability.
Compare all turbomolecular pumps.
For a mobile dry pumping system with ECODRY 35 plus backing and TURBO.CONTROL i, see the Leybold TURBOLAB 950 pumping station. Compare inlet flanges, controls and regional electrical options.
| Manufacturer | LEYBOLD |
|---|---|
| Equipment type | Turbomolecular Pumps |
| Pumping speed — nitrogen | 900 l/s |
| End / ultimate pressure | 3 × 10^-8 / 3 × 10^-10 mbar, with two-stage oil-sealed rotary vane backing pump — ISO-K / CF |
| High-vacuum inlet connection | DN200 ISO-K or CF |
| Backing connection | DN25 KF |
| Maximum power consumption | 600 W |
| Cooling | Convection; optional air or water cooling |
| Pumping speed — argon | 840 l/s |
| Pumping speed — helium | 925 l/s |
| Pumping speed — hydrogen | 770 l/s |
| Ordering options | 8 manufacturer codes — see configuration table |
| Gas throughput (N₂) | 14 mbar·l/s |
| Compression ratio (N₂) | >1 × 10¹¹ |
| Gas throughput (Ar) | 3.5 mbar·l/s |
| Compression ratio (Ar) | >1 × 10¹¹ |
| Gas throughput (He) | 21 mbar·l/s |
| Compression ratio (He) | 1.3 × 10⁸ |
| Gas throughput (H₂) | >15 mbar·l/s |
| Compression ratio (H₂) | 4.4 × 10⁶ |
| Maximum forevacuum pressure (N₂) | 15 mbar |
| Operating speed | 49,200 rpm |
| Supply voltage | 48 V DC +5% / −10% |
Send the pump model and part number when asking about a replacement. Compatibility depends on the equipment and operating conditions.
Confirm the exact version, electrical supply and connections. Ask whether oil, filters, fittings, cables or controllers are included or separately specified.
Availability, lead time and the applicable warranty are confirmed for your quotation. A catalogue listing does not reserve stock.
What to check in your quotation · Delivery · Returns and faults
Leybold TURBOVAC 950 i/iX Turbomolecular Vacuum Pump
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Compare the stated conditions as well as the values. A missing specification is not a zero rating; confirm suitability with Girovac.
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