Coating and deposition systems need a vacuum arrangement matched to the process gas, base pressure and cycle. Separate the needs of the process chamber, load-lock and backing line before selecting pumps or instruments.
Map the vacuum stages
- Roughing: evacuate the chamber from atmosphere with a suitable backing or rough-vacuum pump.
- High vacuum: select a turbomolecular or other suitable high-vacuum stage for the required pressure and gases.
- Load-lock: consider cycle time, volume, repeated gas loads and separate pumping where appropriate.
- Process control: define gas admission, pressure measurement, isolation and safe operating sequences.
Connect the relevant product families
For high-vacuum pumping, compare Leybold TURBOVAC i / iX and Edwards nEXT. Complete TURBOLAB and T-Station stations combine components, but their suitability still depends on chamber duty and supplied configuration.
For roughing and backing duties, review DRYVAC, Edwards nXRi and SOGEVAC. A RUVAC booster is an option within an engineered pumping combination, rather than a substitute for a turbo stage.
Measurement, valves and contamination control
Specify measurement across the roughing and high-vacuum ranges. Gauge response, gas dependence, contamination exposure and controller compatibility matter as well as the displayed range. Keep sensors and pump internals protected from deposition products as required by the equipment manufacturer.
Gauge selection guide · LEYCON vacuum valves · Vacuum fittings
What sets the chamber pressure?
The pump’s catalogue speed alone does not define performance at the chamber. Connecting pipework, valve conductance, gas load, leaks and outgassing affect the result. Gas-specific pump ratings and process compatibility must be checked; a nitrogen rating is not an all-gas guarantee.
Is a complete pumping station ready for any coating process?
No. A station can simplify component selection, but reactive gases, deposition material, cooling, shielding, controls and the required pressure must still be reviewed. Identify accessories and integration work explicitly in the quotation.
Get help specifying the equipment
For coating or deposition, send the chamber volume, target and working pressures, required cycle time, gas or vapour composition, temperature, operating hours and available power. Include any existing pump and gauge details. Girovac can then review the pump, protection, instrumentation and accessories as one proposed scope.
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