Diffusion Pumps

Planning a diffusion pump installation

Compare the pump, backing arrangement, cooling requirements and specified working fluid as one installation. Include any baffles, traps, valves and gauges already fitted. Fluid selection and operating procedures should follow the instructions for the actual pump model.

Frequently asked questions

What else is needed with a diffusion pump?

A diffusion pump requires a suitable backing pump and the services and controls specified by its manufacturer. Confirm cooling, heater supply, valves and measurement arrangements when comparing a replacement or complete installation.

Which diffusion pump fluid should I use?

Use the fluid specified or approved for the pump and process. Product name, fluid chemistry and operating requirements matter; similar descriptions do not make two fluids interchangeable. Send the pump model and the reference of the fluid currently used.

Can I replace a diffusion pump with a turbomolecular pump?

This needs a system review. Check the pressure and gas load, chamber connection, cleanliness requirements, backing arrangement and controls. It is not simply a matter of fitting a pump with the same nominal pumping speed.

What information helps identify a replacement diffusion pump?

Send the manufacturer and model, inlet size, existing fluid, cooling arrangement and heater supply. Include the target pressure and process gases, plus any constraints on installation space or existing pipework.

Related equipment and guidance

Compare turbomolecular alternatives · Explore backing pump options · Diffusion pump fluid guide