A combined Pirani and Bayard–Alpert instrument for systems that need pressure measurement from pump-down to ultra-high vacuum. The hot-cathode section uses a double filament.
Shown: Thyracont VSH Pirani and hot-cathode vacuum transducer range. Select the model, sensor, connection and interface required for the application.
Measurement principle
Pirani and Bayard–Alpert; gas-dependent
Measuring range
1000 to 5 × 10⁻¹⁰ mbar
Pressure reference
Absolute
Accuracy
About ±30% of reading at 1000–10 mbar; ±10% at 10–10⁻⁸ mbar
Price and availability
Tell us the configuration and quantity you need. Include your process requirements if you would like help with selection.
A combined Pirani and Bayard–Alpert instrument for systems that need pressure measurement from pump-down to ultra-high vacuum. The hot-cathode section uses a double filament.
Selection and installation
Tell us about the chamber, expected gases, bakeout conditions and target pressure. Select the appropriate flange and check the operating procedure for the filament and degassing function.
Questions about this instrument
Does a UHV gauge make a system suitable for UHV?
No. Chamber design, seals, cleanliness, pumping and gas load determine the achievable pressure. The gauge must be matched to that system.
Can I request calibration with my gauge?
Yes. Tell us the operating range, required test points and certificate requirement. We will confirm the calibration option for the selected instrument before quoting. Discuss vacuum gauge calibration.
Where could this instrument be useful in a vacuum system?
For a turbo-pumped chamber, consider the measurement requirement alongside the nEXT85D turbomolecular pump. Measure at the point that matters to the process and select the gauge for the working pressure, gas and interface. A pump’s ultimate-pressure specification is not a substitute for a chamber measurement.
Specify your requirement
Send the pressure range and reference (absolute or relative), process gas, connection, quantity and required delivery date. Include the existing model or a photograph for replacement enquiries.
See the Leybold IONIVAC ITR 90 for hot-cathode/Pirani measurement, flange and display options, manufacturer instructions and control requirements. Its full display range is distinct from its specified accuracy band.
Specifications
Equipment type
Vacuum gauges & instrumentation / High & Ultra-high Vacuum Gauges
Measurement principle
Pirani and Bayard–Alpert; gas-dependent
Measuring range
1000 to 5 × 10⁻¹⁰ mbar
Pressure reference
Absolute
Accuracy
About ±30% of reading at 1000–10 mbar; ±10% at 10–10⁻⁸ mbar
Filament
Yttria-coated iridium; double filament
Supply
20–30 V DC
Interfaces
RS485; 0–10 V, EtherCAT or PROFINET versions
Connection
DN25 KF, DN40 KF or DN40 CF-F
Flange bakeout
Up to 180°C with supply disconnected
Calibration and instrument support
Send the gauge model, pressure range and process details for calibration, replacement or compatibility advice.
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